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Mathematik für Innovationen in Industrie und Dienstleistungen
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Research network within the BMBF funded program
Mathematics for Innovations in Industry and Services

MODEL REDUCTION FOR FAST SIMULATION OF NEW SEMICONDUCTOR STRUCTURES FOR NANOTECHNOLOGY AND MICROSYSTEMS TECHNOLOGY
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Schematic Overview:



Project Duration:

    October 1, 2010 - September 30, 2013

Project description:

An important aspect concerning the development of new semiconductor structures within nanotechnology and microsystems technology is the progressing miniaturization of the structures on the one hand and the increasing of the working frequencies on the other hand. Nano scale structures might require the observance of quantum effects and the high density of electric conductors induces parasitics (e.g. crosstalk). In order to involve these effects already in the design stage, exact knowledge of the semiconductor structures and the surrounding electromagnetic (EM) field is necessary. Another effect, which plays a no longer negligible role are the variations of the feature structure size caused by inaccuracies of the resolution during the lithography. To consider these variations in the simulation, models with parametric uncertainties are required. Simulations of new micro and nano scale systems are essential because of the expensive production of prototypes. In order to be able to do these simulations in acceptable computing time, a model order reduction (MOR) of the used models is necessary.

The joint project is divided into 6 subprojects by
Prof. Dr. Peter Benner, MPI Magdeburg
Prof. Dr. Matthias Bollhöfer, TU Braunschweig
Prof. Dr. Heike Faßbender, TU Braunschweig
Prof. Dr. Michael Hinze, University of Hamburg
Dr. Patrick Lang, Fraunhofer-Institut für Techno- und Wirtschaftsmathematik (ITWM) Kaiserslautern
Dr. Tatjana Stykel, University of Augsburg
Prof. Dr. Thomas Weiland, TU Darmstadt
Dr. Carsten Hammer, Infineon Technologies AG
Prof. Dr. Irina Munteanu, Computer Simulation Technology AG
Andreas Ripp, MunEDA GmbH
Dr. Herwig Döllefeld, X-FAB Semiconductor Foundries AG


Further information according to the project and the single subprojects can be found under the particular descriptions and on the Mathematik 21 (german) portal. MoreSim4Nano is the follower of the project System Reduction for Nanoscale IC Design (SyreNe).